Kalrez Semiconductor O-Rings

Kalrez® Sahara™ 8375

This compound is formulated using a special blend of white filler that enables it to withstand the most severe dry and plasma processing environments. This white compound has been optimized for low weight loss and low particle generation in bothO2 and fluorine plasmas. Its combination of high temperature performance, mechanical properties, and low compression set characteristics make it an excellent choice for both static and dynamic dry process seal applications (e.g., gate valves, door seals, chamber lid seals, etc.). A maximum continuous service temperature of 300°C (572°F) is suggested. Static and dynamic service in all dry chemicals and plasmas. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8375.

Kalrez ® 6375UP is a new compound for semicon-ductor wet process applications. This compound exhibits excellent chemical resistance to all different types of wet process chemistry including acids, bases and amine-base strippers. It features low elemental extractables with good mechanical and compression set properties and is well-suited for both static and dynamic wet process seal applications (e.g., filter seals, drain seals, flowmeters). A maximum continuous service temperature of 275°C is suggested. Ultrapure post-cleaning and packaging is standard for parts made of compound 6375UP.

Kalrez® Sahara™ 8575

The newest addition to the Sahara family of ultrapure products. This compound,specially formulated for improved performance in etch, CVD and strippingprocesses, offers lower cost of ownership with reduced contamination and longer seal life. This white perfluoroelastomer compound utilizes a new proprietary polymer and crosslinking system. It builds on the excellent plasma resistance of Kalrez Sahara 8375 with reduced weight loss, particle generation and outgassing, as well asimproved elastic recovery properties. Sahara Plasma 8575 offers excellent resistance to both O2 and fluorine plasma as wellas chlorinatedcleaning gasses (e.g., CIF3), exhibits axcellent vacuum and long term sealing performance, has good mechanical properties and is well-suited for both static and dynamic dry process seal applications (slit valve doors, chamber lids, gas inlets, ect) It's maximum continuous service temperature rating of 280°C (536°F) is well above the typical requirements for seals used in these processes. Ultrapure post-cleaning and packaging is standard for all parts made of Plasma 8575.

Kalrez® Sahara™ 8385

The original compound in the Sahara family of products developed as a result of ongoing efforts in partnership with key industry OEMs and fabs. Is exhibits excellent resistance to plasma and dry process chemistries. This 83 Durometer white compound has good mechanical properties and excellent vacuum sealing performance and is well suited for many static and dynamic applications (e.g., quartz tube seals, door seals, lip seals, etc.). A maximum continuos service temperature of 275°C (527°F) is suggested. Static and dynamic service in all dry chemicals and plasmas. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8385.

Kalrez® Sahara™ 8475

Developed for thermal processes (diffusion furnace, LPCVD, RTP, lamp anneal, ect) It exhibits excelent thermal stability and long term sealing performance, less IR absorption and significantly reduced outgassing at elevated temperatures. It offers excellant resistance to dry process chemistry, has good mechanical properties and is well suited for static and low stress sealing force applications (quartz tube seals, ball joint seals, gass feed through seals, bell jar seals plenum seals, ect) A maximum continuos service temperature of 300°C (572°F) is suggested. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8475.

Kalrez® 8101

Offers excellent compression set characteristic for dry chemical processes and plasma environments. Its high service temperature rating, low outgassing characteristics, and low hardness make it well suited for vacuum service and low stress/low sealing force static applications. A maximum continuos service temperature of 300°C (572°F) is suggested. Static and low stress service in all dry chemicals and plasmas. Ultrapure post-cleaning and packaging is standard for all parts manufactured using compound 8101

Kalrez® 8201

Specially formulated for wet chemical process applications. In addition to its excellent resistance to Pirahna, UPDI, and other wafer etching, cleaning, and stripping chemistries, compound 8201 features lower elemental, anionic, and total organic carbon extractable than competitive perfluoroelastomer. A maximum continuos service temperature of 220°C (428°F) is suggested. Static service for minimal ionic extractable in all wet media. Ultrapure post-cleaning and packaging is standard for all parts made of compound 8201.

Indusrtrial Compounds sometimes used in Semiconductor Applications

Kalrez® 4079
A low compression set compound for general-purpose use in O-rings, diaphragms, seals, and other parts used in the process and aircraft industries, as well as many wet and dry semiconductor process environments. It is a carbon black-filled compound with excellent chemical resistance, good mechanical properties, and outstanding hot air aging properties. It exhibits low swell in organic an inorganic acids and aldehydes and has good response to temperature cycling effects. A maximum operating temperature of 316ºC (600ºF) is recommended, with short excursions to higher temperatures possible. Static and dynamic, high temperature wet and dry, except )2/C12 plasmas. This compound is not recommended for use in hot water/steam applications or in contact with certain hot aliphatic amines, ethylene

Kalrez® 2037
A non-black-filled compound that is well suited for selected applications n the pharmaceutical, semiconductor, and other markets that demand high purity elastomers. Compound 2037 has excellent chemical resistance exhibiting low swell in organic acids, inorganic acids, esters, ketones, and aldehydes. it also offers good mechanical properties. A maximum service temperature of 220ºC (428ºF) is recommended. Static and dynamic service in dry chemical up to 200ºC (428ºF).

Kalrez® 6375
A carbon black-filled compound for general use in O-rings, seals, diaphragms and other specialty parts specifically for the chemical process industry. This compound has excellent, broad chemical resistance, good mechanical properties, and outstanding hot-air aging properties. 6375 is well suited for mixed process streams because of its excellent resistance to acids, bases, and amines. In addition, it is the suggested compound for use in hot water steam, ethylene oxide and propylene oxide. A maximum service temperature of 275ºC (525ºF) is recommended.

Kalrez® 1050LF
A general-purpose compound for O-rings, seals, and other parts used in chemical process industries. Its is also recommended for use in select semiconductor wet process applications where high concentrations of certain amines are present. It has good hot water/steam, excellent amine resistance, and enhanced compression set properties. Maximum recommended service temperature of 288ºC (527ºF). Special applications; wet amine media or low outgassing at high temperature. Not recommended for use in organic or inorganic acids at high temperatures.

The information set forth herein is furnished free of charge and is based on technical data that DuPont Dow Elastomers believes to be reliable. It is intended for use by persons having technical skill, at their own discretion and risk. The handling precaution information contained herein is given with the understanding that those using it will satisfy themselves that their particular conditions of use present no health or safety hazards. Because conditions of product use and disposal are outside our control, we make no warranties, express or implied, and assume no liability in connection with any use of this information. As with any material, evaluation of any compound under end-use conditions prior to specification is essential. Nothing herein is to be taken as a license to operate under or a recommendation to infringe on any patents.

Kalrez® Compound	Color	Hardness ShoreA	Service Temperature °C(°F)	M100 Modulus MPa (psi)	Comr. Set at 70 hr, 204°C (400°F)	Filler System
Sahara™ 8375	White	76	300 (572)	5.1 (740)	20	Special Blend, white fillers
6375UP	Black	75	275 (527)	7.2 (1,050)	30	Carbon black filled
Sahara™ 8575	White	74	280 (536)	2.5 (360)	29	Special Blend, white fillers
Sahara™ 8385	White	83	275 (527)	8.6 (1,250)	35	Special Blend, white fillers
Sahara™ 8475	White	72	300 (572)	2.2 (320)	23	Special Blend, white fillers
8101UP	Gray	65	300 (572)	2.3 (300)	18	Nonreactive filler
8201UP	Brown	79	220 (428)	4.5 (590)	29	Unfilled
4079	Black	75	316 (600)	7.2 (1,050)	25	Carbon black filled
2037	White	79	220 (428)	6.2 (900)	27	Mineral filled
6375	Black	75	275 (527)	7.2 (1,050)	30	Carbon black filled
1050LF	Black	82	288 (550)	12.4 (1,800)	35	Carbon black filled